Breaking Bad star Bryan Cranston was named best actor in a drama, the fourth time he has won the prize. The show was also named best drama.
Co-stars Aaron Paul and Anna Gunn were honoured in categories for best drama supporting acting.
The show's creator, Vince Gilligan, said the night was a "wonderful farewell" to the series about a teacher-turned-drug kingpin.
The Good Wife's Julianna Margulies won the Emmy for best lead actress in a drama series.
True Detective star Matthew McConaughey was the object of too-handsome jokes by presenter Jimmy Kimmel and Gail Mancuso, who was named as best director for an episode of Modern Family, referenced him in her speech.
"If you don't mind, Matthew McConaughey, I'm gonna make eye contact with you right now," she said from the stage, and proceeded to hold the actor's gaze for much of her speech.
McConaughey and his co-star Woody Harrelson were given time to joke before announcing that Briton Benedict Cumberbatch of Sherlock: His Last Vow was the winner of the best mini-series actor award.
"So you won Oscar, (People magazine's) Sexiest Man Alive and now you want an Emmy, too. Isn't that a little bit greedy?" Harrelson teased.
There was success for Martin Freeman, who was honoured with the supporting actor award for his role as Dr Watson in Sherlock.
The show's writer, Steven Moffat, picked up the outstanding mini-series writer prize.
Briton Colin Bucksey was also named best director for Fargo, in which Freeman played the lead role.
The show was named best mini-series, while the prize for best mini-series actress went to Jessica Lange of American Horror Story: Coven.
The British stars of Downton Abbey, Michelle Dockery, Dame Maggie Smith and Joanne Froggatt failed to pick up a prize following their nominations.
The Big Bang Theory star Jim Parsons was named best comedy series actor, giving him his fourth Emmy and putting him in league with all-time sitcom winners Kelsey Grammer and Michael J Fox.
Modern Family tied Frasier as the all-time sitcom champion with five Emmys and Ty Burrell won best comedy supporting actor for his part in the show.
Allison Janney was honoured as best supporting comedy actress for Mom, adding to the trophy she had already picked up as guest actress on Masters Of Sex.
Julia Louis-Dreyfus received her third consecutive best comedy actress Emmy for the political comedy Veep and she drew big laughs as she stopped to exchange faux heated kisses with Cranston.
The ceremony's traditional "in memorian" tribute to industry members who have died in the past year paid tribute to stars including James Garner, Ruby Dee, Sid Caesar, Carmen Zapata and Elaine Stritch.